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1

Tailoring nanoporous materials by atomic layer deposition

Detavernier, Christophe, Dendooven, Jolien, Pulinthanathu Sree, Sreeprasanth, Ludwig, Karl F., Martens, Johan A.

Journal:

Chemical Society Reviews

Year:

2011

Language:

english

File:

PDF, 5.63 MB

english, 2011

2

Modeling the Conformality of Atomic Layer Deposition: The Effect of Sticking Probability

Dendooven, J., Deduytsche, D., Musschoot, J., Vanmeirhaeghe, R. L., Detavernier, C.

Journal:

Journal of The Electrochemical Society

Year:

2009

Language:

english

File:

PDF, 216 KB

english, 2009

3

Synthesis of uniformly dispersed anatase nanoparticles inside mesoporous silica thin films via controlled breakup and crystallization of amorphous TiO2 deposited using atomic layer deposition

Sree, Sreeprasanth Pulinthanathu, Dendooven, Jolien, Masschaele, Kasper, Hamed, Heidari M., Deng, Shaoren, Bals, Sara, Detavernier, Christophe, Martens, Johan A.

Journal:

Year:

2013

Language:

english

File:

PDF, 2.21 MB

english, 2013

4

Reactor concepts for atomic layer deposition on agitated particles: A review

Longrie, Delphine, Deduytsche, Davy, Detavernier, Christophe

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2014

Language:

english

File:

PDF, 2.25 MB

english, 2014

5

Chemically Triggered Formation of Two-Dimensional Epitaxial Quantum Dot Superlattices

Walravens, Willem, De Roo, Jonathan, Drijvers, Emile, ten Brinck, Stephanie, Solano, Eduardo, Dendooven, Jolien, Detavernier, Christophe, Infante, Ivan, Hens, Zeger

Journal:

Year:

2016

Language:

english

File:

PDF, 61.15 MB

english, 2016

6

Plasma-Enhanced Atomic Layer Deposition of Iron and Titanium Phosphates as Electrode Materials for 3D-Structured Lithium-Ion Microbatteries

Dobbelaere, T., Mattelaer, F., Dendooven, J., Vereecken, P. M., Detavernier, C.

Journal:

ECS Transactions

Year:

2016

Language:

english

File:

PDF, 733 KB

english, 2016

7

Electron Transfer and Near-Field Mechanisms in Plasmonic Gold-Nanoparticle-Modified TiO2 Photocatalytic Systems

Asapu, Ramesh, Claes, Nathalie, Ciocarlan, Radu-George, Minjauw, Matthias M., Detavernier, Christophe, Cool, Pegie, Bals, Sara, Verbruggen, Sammy W.

Journal:

ACS Applied Nano Materials

Year:

2019

Language:

english

File:

PDF, 4.56 MB

english, 2019

8

Thermal and Plasma-Enhanced Atomic Layer Deposition of Yttrium Oxide Films and the Properties of Water Wettability

Zhao, Bo, Mattelaer, Felix, Rampelberg, Geert, Dendooven, Jolien, Detavernier, Christophe

Journal:

ACS Applied Materials & Interfaces

Year:

2020

File:

PDF, 1.32 MB

2020

9

Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy

Vandenbroucke, Sofie S. T., Levrau, Elisabeth, Minjauw, Matthias M., Van Daele, Michiel, Solano, Eduardo, Vos, Rita, Dendooven, Jolien, Detavernier, Christophe

Journal:

Physical Chemistry Chemical Physics

Year:

2020

File:

PDF, 2.39 MB

2020

10

Influence of processing conditions on CoSi2 formation in the presence of a Ti capping layer

C. Detavernier, R.L. Van Meirhaeghe, W. Vandervorst, K. Maex

Journal:

Microelectronic Engineering

Year:

2004

Language:

english

File:

PDF, 471 KB

english, 2004

11

In-situ X-ray Diffraction study of Metal Induced Crystallization of amorphous silicon

W. Knaepen, C. Detavernier, R.L. Van Meirhaeghe, J. Jordan Sweet, C. Lavoie

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 850 KB

english, 2008

12

Texture of CoSi2 films on Si(111), (110) and (001) substrates

K. De Keyser, C. Detavernier, J. Jordan-Sweet, C. Lavoie

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 1.07 MB

english, 2010

13

Solid-state formation of titanium carbide and molybdenum carbide as contacts for carbon-containing semiconductors

Leroy, W. P., Detavernier, C., Van Meirhaeghe, R. L., Kellock, A. J., Lavoie, C.

Journal:

Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 706 KB

english, 2006

14

Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition

Rampelberg, Geert, Deduytsche, Davy, De Schutter, Bob, Premkumar, Peter Antony, Toeller, Michael, Schaekers, Marc, Martens, Koen, Radu, Iuliana, Detavernier, Christophe

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.89 MB

english, 2014

15

Determination of the dominant diffusing species during nickel and palladium germanide formation

Comrie, C.M., Smeets, D., Pondo, K.J., der Walt, C. van, Demeulemeester, J., Knaepen, W., Detavernier, C., Habanyama, A., Vantomme, A.

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 953 KB

english, 2012

16

Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries

Dobbelaere, Thomas, Mattelaer, Felix, Dendooven, Jolien, Vereecken, Philippe, Detavernier, Christophe

Journal:

Chemistry of Materials

Year:

2016

Language:

english

File:

PDF, 4.33 MB

english, 2016

17

Texture in thin film silicides and germanides: A review

De Schutter, B., De Keyser, K., Lavoie, C., Detavernier, C.

Journal:

Applied Physics Reviews

Year:

2016

Language:

english

File:

PDF, 12.44 MB

english, 2016

18

Atomic layer deposition of vanadium oxides: process and application review

Prasadam, V.P., Bahlawane, N., Mattelaer, F., Rampelberg, G., Detavernier, C., Fang, L., Jiang, Y., Martens, K., Parkin, I.P., Papakonstantinou, I.

Journal:

Materials Today Chemistry

Year:

2019

File:

PDF, 7.33 MB

2019

19

Plasmonic gold-embedded TiO2 thin films as photocatalytic self-cleaning coatings

Peeters, Hannelore, Keulemans, Maarten, Nuyts, Gert, Vanmeert, Frederik, Li, Chen, Minjauw, Matthias, Detavernier, Christophe, Bals, Sara, Lenaerts, Silvia, Verbruggen, Sammy W.

Journal:

Applied Catalysis B: Environmental

Year:

2020

Language:

english

File:

PDF, 2.94 MB

english, 2020

20

Atomic layer deposition of nitrogen doped Al-phosphate coatings for Li-ion battery applications

Henderick, Lowie, Hamed, Hamid, Mattelaer, Felix, Minjauw, Matthias M., Meersschaut, Johan, Dendooven, Jolien, Safari, Mohammadhosein, Vereecken, Philippe M., Detavernier, Christophe

Journal:

ACS Applied Materials & Interfaces

Year:

2020

File:

PDF, 1.68 MB

2020

21

Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma

Qi Xie, Jan Musschoot, Christophe Detavernier, Davy Deduytsche, Roland L Van Meirhaeghe, Sven Van den Berghe, Yu-Long Jiang, Guo-Ping Ru, Bing-Zong Li, Xin-Ping Qu

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 1.18 MB

english, 2008

22

Stress evolution during Ni–Si compound formation for fully silicided (FUSI) gates

C. Torregiani, C. Van Bockstael, C. Detavernier, C. Lavoie, A. Lauwers, K. Maex, J.A. Kittl

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 367 KB

english, 2007

23

Atomic layer deposition of titanium nitride from TDMAT precursor

J. Musschoot, Q. Xie, D. Deduytsche, S. Van den Berghe, R.L. Van Meirhaeghe, C. Detavernier

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 434 KB

english, 2009

24

Electrical characteristics of CoSi2/n-Si(1 0 0) Schottky barrier contacts formed by solid state reaction

Shiyang Zhu, C Detavernier, R.L Van Meirhaeghe, F Cardon, Guo-Ping Ru, Xin-Ping Qu, Bing-Zong Li

Journal:

Solid-State Electronics

Year:

2000

Language:

english

File:

PDF, 218 KB

english, 2000

25

Towards implementation of a nickel silicide process for CMOS technologies

C. Lavoie, F.M. d’Heurle, C. Detavernier, C. Cabral Jr.

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 652 KB

english, 2003

26

In situ and ex situ investigation on the annealing performance of the ZnO film grown by ion beam deposition

Tao Chen, Shu-Yi Liu, Qi Xie, Christophe Detavernier, R. L. Van Meirhaeghe, Xin-Ping Qu

Journal:

Journal of Materials Science: Materials in Electronics

Year:

2010

Language:

english

File:

PDF, 546 KB

english, 2010

27

Optimization of Electrodeposited p-Doped Sb2Te3 Thermoelectric Films by Millisecond Potentiostatic Pulses

Christian Schumacher, Klaus G. Reinsberg, Lewis Akinsinde, Sebastian Zastrow, Sonja Heiderich, William Toellner, Geert Rampelberg, Christophe Detavernier, José A. C. Broekaert, Kornelius Nielsch, Juli

Journal:

Advanced Energy Materials

Year:

2012

Language:

english

File:

PDF, 2.32 MB

english, 2012

28

Solution derived ZnO:Al films with low resistivity

K. Schellens, B. Capon, C. De Dobbelaere, C. Detavernier, A. Hardy, M.K. Van Bael

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 858 KB

english, 2012

29

AlSi matrices for U(Mo) dispersion fuel plates

Leenaers, A., Van den Berghe, S., Detavernier, C.

Journal:

Journal of Nuclear Materials

Year:

2013

Language:

english

File:

PDF, 1.29 MB

english, 2013

30

Swelling of U(Mo) dispersion fuel under irradiation – Non-destructive analyses of the SELENIUM plates

Van den Berghe, S., Parthoens, Y., Cornelis, G., Leenaers, A., Koonen, E., Kuzminov, V., Detavernier, C.

Journal:

Journal of Nuclear Materials

Year:

2013

Language:

english

File:

PDF, 2.99 MB

english, 2013

31

Semiconductor-metal transition in thin VO[sub 2] films grown by ozone based atomic layer deposition

Rampelberg, Geert, Schaekers, Marc, Martens, Koen, Xie, Qi, Deduytsche, Davy, De Schutter, Bob, Blasco, Nicolas, Kittl, Jorge, Detavernier, Christophe

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 809 KB

english, 2011

32

Transparent conducting oxide films of group V doped titania prepared by aqueous chemical solution deposition

Elen, Ken, Capon, Boris, De Dobbelaere, Christopher, Dewulf, Daan, Peys, Nick, Detavernier, Christophe, Hardy, An, Van Bael, Marlies K.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.69 MB

english, 2014

33

Formation and texture of palladium germanides studied by in situ X-ray diffraction and pole figure measurements

Geenen, F.A., Knaepen, W., De Keyser, K., Opsomer, K., Vanmeirhaeghe, R.L., Jordan-Sweet, J., Lavoie, C., Detavernier, C.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.50 MB

english, 2014

34

Thermal-stability optimization of Al2O3/Cu–Te based conductive-bridging random access memory systems

Goux, L., Opsomer, K., Franquet, A., Kar, G., Jossart, N., Richard, O., Wouters, D.J., Müller, R., Detavernier, C., Jurczak, M., Kittl, J.A.

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 1.60 MB

english, 2013

35

Electron barrier height at CuxTe1−x/Al2O3 interfaces of conducting bridge memory stacks

Afanas'ev, V.V., De Stefano, F., Houssa, M., Stesmans, A., Goux, L., Opsomer, K., Detavernier, C., Kittl, J.A., Jurczak, M.

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 336 KB

english, 2013

36

Surface engineering of low enriched uranium–molybdenum

Leenaers, A., Van den Berghe, S., Detavernier, C.

Journal:

Journal of Nuclear Materials

Year:

2013

Language:

english

File:

PDF, 3.13 MB

english, 2013

37

Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone

Dendooven, Jolien, Ramachandran, Ranjith K., Devloo-Casier, Kilian, Rampelberg, Geert, Filez, Matthias, Poelman, Hilde, Marin, Guy B., Fonda, Emiliano, Detavernier, Christophe

Journal:

The Journal of Physical Chemistry C

Year:

2013

Language:

english

File:

PDF, 1.66 MB

english, 2013

38

[IEEE 2011 3rd IEEE International Memory Workshop (IMW) - Monterey, CA, USA (2011.05.22-2011.05.25)] 2011 3rd IEEE International Memory Workshop (IMW) - Self-Limited Filament Formation and Low-Power Resistive Switching in CuxTe1-x/Al2O3/Si CBRAM Cell

Goux, L., Opsomer, K., Schuitema, R., Degraeve, R., Muller, R., Detavernier, C., Wouters, D. J., Jurczak, M., Altimime, L., Kittl, J. A.

Year:

2011

Language:

english

File:

PDF, 1.08 MB

english, 2011

39

Sn diffusion during Ni germanide growth on Ge1–xSnx

Demeulemeester, J., Schrauwen, A., Nakatsuka, O., Zaima, S., Adachi, M., Shimura, Y., Comrie, C. M., Fleischmann, C., Detavernier, C., Temst, K., Vantomme, A.

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 1.56 MB

english, 2011

40

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality

Detavernier, Christophe, Dendooven, Jolien, Deduytsche, Davy, Musschoot, Jan

Year:

2008

Language:

english

File:

PDF, 333 KB

english, 2008

41

Effect of metal liner on electromigration in Cu Damascene lines

Hu, C.-K., Gignac, L. M., Liniger, E., Detavernier, C., Malhotra, S. G., Simon, A.

Journal:

Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 523 KB

english, 2005

42

[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - Comparison of the Ru thin films grown on Si, TiN/Si and TaN/Si substrates by plasma enhanced atomic layer deposition

Xie, Qi, Musschoot, Jan, Detavernier, Christophe, Deduytsche, Davy, Van Meirhaeghe, Roland L., Jiang, Yu-Long, Ru, Guo-Ping, Li, Bing-Zong, Qu, Xin-Ping

Year:

2008

Language:

english

File:

PDF, 2.62 MB

english, 2008

43

[IEEE 2012 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2012.06.12-2012.06.14)] 2012 Symposium on VLSI Technology (VLSIT) - Field-driven ultrafast sub-ns programming in W\Al2O3\Ti\CuTe-based 1T1R CBRAM system

Goux, L., Sankaran, K., Kar, G., Jossart, N., Opsomer, K., Degraeve, R., Pourtois, G., Rignanese, G.-M., Detavernier, C., Clima, S., Chen, Y.-Y., Fantini, A., Govoreanu, B., Wouters, D.J., Jurczak, M.

Year:

2012

Language:

english

File:

PDF, 1018 KB

english, 2012

44

Fuel swelling and interaction layer formation in the SELENIUM Si and ZrN coated U(Mo) dispersion fuel plates irradiated at high power in BR2

Leenaers, A., Van den Berghe, S., Koonen, E., Kuzminov, V., Detavernier, C.

Journal:

Journal of Nuclear Materials

Year:

2015

Language:

english

File:

PDF, 3.20 MB

english, 2015

45

Growth and Material Characterization of Hafnium Titanates Deposited by Atomic Layer Deposition

Popovici, Mihaela, Delabie, Annelies, Van Elshocht, Sven, Clima, Sergiu, Pourtois, Geoffrey, Nyns, Laura, Tomida, Kazuyuki, Menou, Nicolas, Opsomer, Karl, Swerts, Johan, Detavernier, Christophe, Woute

Journal:

Journal of The Electrochemical Society

Year:

2009

Language:

english

File:

PDF, 351 KB

english, 2009

46

Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator

Yebo, Nebiyu A., Sree, Sreeprasanth Pulinthanathu, Levrau, Elisabeth, Detavernier, Christophe, Hens, Zeger, Martens, Johan A., Baets, Roel

Journal:

Year:

2012

Language:

english

File:

PDF, 1.69 MB

english, 2012

47

Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN

Sun, Yiting, Levrau, Elisabeth, Blauw, Michiel, Meersschaut, Johan, Verdonck, Patrick, Struyf, Herbert, Detavernier, Christophe, Baklanov, Mikhail, De Feyter, Steven, Armini, Silvia

Journal:

MRS Proceedings

Year:

2013

Language:

english

File:

PDF, 26.75 MB

english, 2013

48

Visualization and classification of epitaxial alignment at hetero-phase boundaries

De Schutter, B., De Keyser, K., Detavernier, C.

Journal:

Thin Solid Films

Year:

2016

Language:

english

File:

PDF, 2.61 MB

english, 2016

49

The Influence of Ti Capping Layers on CoSi2 Formation in the Presence of Interfacial Oxide

Detavernier, C., Donaton, R. A., Maex, K., Jin, S., Bender, H., Van Meirhaeghe, R., Cardon, F.

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 1.53 MB

english, 1999

50

CoSi2 formation using a Ti capping layer - The influence of processing conditions on CoSi2 nucleation.

Detavernier, C., Van Meirhaeghe, R.L., Maex, K.

Journal:

MRS Proceedings

Year:

2001

Language:

english

File:

PDF, 78 KB

english, 2001

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